Foundations of Mems

By Chang Liu

Book Overview

Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. KEY TOPICS: Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology - all in a time-efficient and methodical manner. Concise background information is included from several engineering domains. A wealth of examples and problems solidify readers' understanding of abstract concepts and provide ample opportunities for practicing critical thinking. MARKET: Ideal for readers new to Micro-Electro-Mechanical Systems (MEMS).

• Format: Hardcover
• Language: English
• ISBN: 0132497360
• ISBN13: 9780132497367
• Release Date: March 2011
• Publisher: Pearson
• Length: 576 Pages
• Weight: 2.65 lbs.
• Dimensions: 1.3" x 7.4" x 9.1"