Fluorine Enriched Silicon: Properties and Advantages

By Giuliana Impellizzeri

Si-based microelectronic community is experiencing a sort of revolution, in order to meet the scaling rate demanded by high-tech industries. Shallow p-type junctions with high active dopant... This description may be from another edition of this product.

• Format: Paperback
• Language: English
• ISBN: 3843374082
• ISBN13: 9783843374088
• Release Date: November 2010
• Publisher: LAP Lambert Academic Publishing
• Length: 120 Pages
• Weight: 0.41 lbs.
• Dimensions: 0.3" x 6.0" x 9.0"