Fluid pressure sensor: United States Patent 9976922

By: Plochinger, Heinz

The disclosure relates to a pressure sensor for measuring a fluid pressure, in particular a vacuum pressure. The pressure sensor contains a first and a second diaphragm connected to one another such that they enclose and hermetically seal a fluid space. Fluid can enter and exit the fluid space through a fluid supply element, which is connected to an exterior opening of the sensor. Each of the diaphragms is proximal to a reference electrode and forms a variable capacitor, the capacitance of which depends on the position of the diaphragms, which in turn depends on the pressure in the fluid space.

• Format: Paperback
• Language: English
• ISBN: B08RGXXJKF
• ISBN13: 9798584468651
• Release Date: January 1
• Publisher: Independently Published
• Length: 28 Pages
• Weight: 0.20 lbs.
• Dimensions: 0.1" x 8.5" x 11.0"