Fabrication Engineering at the Micro- And Nanoscale

by Stephen A. Campbell

Book Overview

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.

With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.
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• Format: Paperback
• Language: English
• ISBN: 0199861226
• ISBN13: 9780199861224
• Release Date: November 2012
• Publisher: Oxford University Press, USA
• Length: 688 Pages
• Weight: 2.37 lbs.
• Dimensions: 1.0" x 7.5" x 9.3"