Experimental Characterization Techniques for Micro/Nanoscale Devices

By Peter G. Hartwell and Kimberly L. Turner

This title introduces commonly utilized and important techniques for the dynamic measurement and characterization of MEMS and NEMS devices. It outlines many of the techniques available for the test and characterization of MEMS and gives guidance in choosing an adequate technique for monitoring certain signals.

• Format: Hardcover
• Language: English
• ISBN: 0387308628
• ISBN13: 9780387308623
• Release Date: March 2007
• Publisher: Springer
• Length: 500 Pages