EUV Sources for Lithography

By BAKSHI

Book Overview

This comprehensive volume, edited by a senior technical staff member at SEMATECH, is the authoritative reference book on EUV source technology. The volume contains 38 chapters contributed by leading... This description may be from another edition of this product.

• Format: Paperback
• Language: English
• ISBN: 0819496251
• ISBN13: 9780819496256
• Release Date: February 2006
• Publisher: SPIE--The International Society for Optical Engineering
• Length: 1094 Pages
• Weight: 1.16 lbs.
• Dimensions: 2.0" x 7.0" x 10.0"