Euv Lithography

By Vivek Bakshi

EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.

• Format: Hardcover
• Language: English
• ISBN: 0470471557
• ISBN13: 9780470471555
• Release Date: December 2008
• Publisher: Wiley
• Length: 702 Pages
• Weight: 3.10 lbs.
• Dimensions: 1.7" x 7.0" x 10.0"