Electron Microscopy Studies of Ion Implanted Silicon

By K. Seshan

Book Overview

The Office of Scientific & Technical Information (OSTI), is a part of the U.S. Department of Energy (DOE) that houses research and development results from projects funded by the DOE. The information is generally an article, technical document, conference paper or dissertation. This is one of those publications.

• Format: Paperback
• Language: English
• ISBN: 1288822413
• ISBN13: 9781288822416
• Release Date: February 2013
• Publisher: Biblioscholar
• Length: 110 Pages
• Weight: 0.47 lbs.
• Dimensions: 0.2" x 7.4" x 9.7"