Electrical and Mechanical Properties of Mesoporous Silica Thin Films

By Amit Pratap Singh

Mesoporous silica (MPS) thin films are attractive for application as low- interlayer dielectric (ILD) in integrated circuits. However these films are susceptible to instabilities in electrical... This description may be from another edition of this product.

• Format: Paperback
• Language: English
• ISBN: 3838367200
• ISBN13: 9783838367200
• Release Date: January 2011
• Publisher: LAP Lambert Academic Publishing
• Length: 140 Pages
• Weight: 0.47 lbs.
• Dimensions: 0.3" x 6.0" x 9.0"