Efficient Extreme Ultraviolet Mirror Design: An FDTD approach

By Yen-Min Lee

Efficient Extreme Ultraviolet Mirror Design describes an approach to designing EUV mirrors with reduced computational time and memory requirements, providing a comprehensive grounding in the fundamentals of the EUV mirror and knowledge of the finite-difference time-domain (FDTD) method. It is an essential reference for EUV industry professionals.

• Format: Hardcover
• Language: English
• ISBN: 0750326506
• ISBN13: 9780750326506
• Release Date: December 2021
• Publisher: Institute of Physics Publishing
• Length: 150 Pages
• Weight: 0.92 lbs.
• Dimensions: 0.3" x 7.0" x 10.0"