Diazonaphthoquinone-based Resists

By Ralph Dammel

This book elucidates the reasons underlying the lasting success of DNQ/N resist systems by examining the correlation between the chemical structure of the components and the photoresist performance.... This description may be from another edition of this product.

• Format: Paperback
• Language: English
• ISBN: 0819410195
• ISBN13: 9780819410191
• Release Date: February 1993
• Publisher: SPIE Publications
• Length: 216 Pages
• Weight: 1.75 lbs.
• Dimensions: 10.3" x 0.5" x 7.3"