Design of a Monolithic 3dof Mems Capacitive Accelerometer

By Muhammad Shuja Khan

Sensors and devices, based on micromachining technology, known as micro-electro-mechanicalsystems or MEMS, have been received increasing attention so far in recent years. Micromachined inertial... This description may be from another edition of this product.

• Format: Paperback
• Language: English
• ISBN: 3845409525
• ISBN13: 9783845409528
• Release Date: July 2011
• Publisher: LAP Lambert Academic Publishing
• Length: 92 Pages
• Weight: 0.32 lbs.
• Dimensions: 0.2" x 6.0" x 9.0"