Database Needs for Modeling and Simulation of Plasma Processing

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Database Needs for Modeling and Simulation of P...

By Panel on Database Needs in Plasma Processing, National Research Council, Commission on Physical Sciences Mathematics and Applications

Edition Description

In spite of its high cost and technical importance, plasma equipment is still largely designed empirically, with little help from computer simulation. Plasma process control is rudimentary. Optimization of plasma reactor operation, including adjustments to deal with increasingly...

Edition Details

Format:Paperback

Language:English

ISBN:0309055911

Format: Paperback

Condition:

51.72

Quantity:

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Database Needs for Modeling and Simulation of P...

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