Computational Modeling in Semiconductor Processing

This text provides coverage of the models, governing equations and numerical techniques suitable for process simulation. It concentrates on such areas as chemical vapour deposition, metal-organic... This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 0890067074
• ISBN13: 9780890067079
• Release Date: September 1994
• Publisher: Artech House Publishers
• Length: 363 Pages
• Weight: 1.45 lbs.
• Dimensions: 1.0" x 6.3" x 9.3"