Compact Plasma and Focused Ion Beams

By Sudeep Bhattacharjee

This book discusses method to produce compact microwave plasma by overcoming challenges posed by geometrical cutoff of waveguide and density cutoff of plasma alongwith the properties of such compact plasmas. It also brings out a new area of applications where such compact high densities plasmas are utilized for multi-element focused ion beams.

• Format: Paperback
• Language: English
• ISBN: 1138033677
• ISBN13: 9781138033672
• Release Date: September 2017
• Publisher: CRC Press
• Length: 392 Pages