Chemical-Mechanical Planarization: Volume 867: Integration, Technology and Reliability

Technology requirements associated with the progressive scaling of devices for future technology nodes, coupled with the aggressive introduction of new materials, places tremendous demands on... This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 1558998209
• ISBN13: 9781558998209
• Release Date: July 2005
• Publisher: Materials Research Society
• Length: 302 Pages