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Characterization of Stress in GaN-on-Sapphire Microelectromechanical Systems Structures Using Micro-Raman Spectroscopy
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Characterization of Stress in GaN-on-Sapphire M... 1288368518 Book Cover

Characterization of Stress in GaN-on-Sapphire M...

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Edition Description

Micro-Raman ( Raman) spectroscopy is an e cient, non-destructive techniquewidely used to determine the quality of semiconductor materials and microelectrome-chanical systems. This work characterizes the stress distribution in wurtzite gal-lium nitride grown on c-plane sapphire...

Edition Details
Format:Paperback
Language:English
ISBN:1288368518
Format: Paperback
Condition:
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17.88
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