Characterization of Silicon Processing (Materials Characterization)

By Gary E. McGuire and Yale Strausser

This volume is devoted to the consideration of the use use of surface, thin film and interface characterization tools in support of silicon-based semiconductor processing. The approach taken is to... This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 0750691727
• ISBN13: 9780750691727
• Release Date: October 1993
• Publisher: Newnes
• Length: 240 Pages
• Weight: 1.20 lbs.
• Dimensions: 9.8" x 0.8" x 6.5"