Characterization and Metrology for ULSI Technology 2005

By D. G. Seiler and Alain C. Diebold D. G. Seiler David G. Seiler

Summarizes major issues and gives reviews of important measurement techniques that are crucial to the advances in semiconductor technology. This book covers major aspects of process technology and most characterization techniques for silicon research, including development, manufacturing, and diagnostics.

• Format: Hardcover
• Language: English
• ISBN: 0735402779
• ISBN13: 9780735402775
• Release Date: September 2005
• Publisher: Springer
• Length: 667 Pages
• Weight: 4.25 lbs.
• Dimensions: 1.7" x 8.4" x 10.9"