Characterization and Metrology for ULSI Technology: 2003 International Conference on Characterization and Metrology for ULSI Technology [With CDROM]

By Thomas J. Shaffner David G. Seiler,Alain C. Diebold

This book/CD-ROM package presents papers from a March 2003 conference on progress in semiconductor technology, detailing major aspects of process technology and most characterization techniques for... This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 0735401527
• ISBN13: 9780735401525
• Release Date: October 2003
• Publisher: American Institute of Physics
• Length: 818 Pages
• Weight: 4.63 lbs.
• Dimensions: 1.9" x 8.5" x 10.8"