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Analytical Modelling of Plasma Immersion Ion Implantation : PIII Models Suiting Semiconductor Applications
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Analytical modelling of Plasma Immersion Ion Im... 365910552X Book Cover

Analytical modelling of Plasma Immersion Ion Im...

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Plasma Immersion Ion Implantation (PIII) is a burgeoning technology in the field of surface modification as well as in semiconductor electronics. Modelling of this technique is an important aspect especially in VLSI/ULSI technology. In this work, more generalized and better realistic...

Edition Details
Format:Paperback
Language:English
ISBN:365910552X
Format: Paperback
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