Analysis of Microelectronic Materials and Devices

By M. Grasserbauer

Book Overview

This book presents, for the first time, a comprehensive survey ofanalytical techniques currently used in support of all stages ofmicroelectronic materials and device processing. The diversity oftopics... This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 0471917133
• ISBN13: 9780471917137
• Release Date: October 1991
• Publisher: John Wiley & Sons Inc
• Length: 980 Pages
• Weight: 3.70 lbs.
• Dimensions: 6.1" x 9.3"