An Electrostatically Actuated Membrane Microvalve

By Ali Şükrü Çubukçu

This book presents an electrostatically actuated, normally open, low pressure-drop silicon membrane microvalve. It is intended to be used in an ion mobility spectrometer in order to enhance its... This description may be from another edition of this product.

• Format: Paperback
• Language: English
• ISBN: 3847330098
• ISBN13: 9783847330097
• Release Date: April 2012
• Publisher: LAP Lambert Academic Publishing
• Length: 116 Pages
• Weight: 0.40 lbs.
• Dimensions: 0.3" x 6.0" x 9.0"