Part I Solution Chemistry.- Simple Alkoxide Based Precursor Systems; Theodor Schneller.- Carboxylate Based Precursor Systems; T. Schneller, D. Griesche.- Mixed Metallo-Organic Precursor Systems; B. Malič et al.- Single Source Precursor Approach -Hydrolysis Mechanisms in Organic Media; V. G. Kessler.- Aqueous Precursor Systems; M. K. Van Bael et al.- Polymer-Assisted Deposition (PAD); A. K. Burrell et al.- Part II Analytical Methods.- Thermal Analysis; B. Malic et al.- X-ray Absorption Spectroscopy; I. Schlipf.- Infrared Spectroscopy; M. Zaharescu, O.C. Mocioiu.- Part III Deposition Techniques.- Dip Coating; C. J. Brinker.- Spin Coating: Art and Science; D.P. Birnie.- Aerosol Deposition; M. Brubaker.- Inkjet Printing and Other Direct Writing Methods; P.G. Clem, N. S. Bell.- Chemical Bath Deposition; M.R. De Guire et al.- Part IV Processing and Crystallization.- Thermodynamics and Heating Processes; R. W. Schwartz, M.Narayanan.- Epitaxial Films; F. Lange.-Orientation and Microstructure Design; S. Hoffmann-Eifert, T. Schneller.- Low-Temperature Processing; S. Glinsek et al.- Composite Film Processing; R. Dorey et al.- UV and E-Beam Direct Patterning of Photosensitive CSD Films; K. Tadanaga, M.S.M. Saifullah.- Template Controlled Growth; S. Clemens, T. Schneller.- Part V Functions and Applications.- Thin Film Multilayer Capacitors; H. Kambara et al.- Base Metal Bottom Electrodes; J. F. Ihlefeld et al.- Polar Oxide Thin Films for MEMS Applications; P. Muralt.- Conducting oxide thin films; C. Haavik, P.M. R rvik.- Transparent Conducting Oxides; P. L?bmann.- Superconducting Films; M. B?cker et al.- Antireflective Coatings and Optical Filters; P. L?bmann.- Luminescent Thin Films: Fundamental Aspects and Practical Applications; S. Fujihara.- Appendix - Syntheses; R. Thelen, T. Schneller.