Advanced Mems/Nems Fabrication and Sensors

This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems)... This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 3030797481
• ISBN13: 9783030797485
• Release Date: October 2021
• Publisher: Springer
• Length: 312 Pages
• Weight: 1.50 lbs.
• Dimensions: 0.8" x 8.0" x 9.4"