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Hardcover A User's Guide to Vacuum Technology Book

ISBN: 0471812420

ISBN13: 9780471812425

A User's Guide to Vacuum Technology

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Book Overview

An introduction to the theory and practice of modern vacuum technology, with applications. Focuses on the understanding, operation, and selection of equipment for vacuum processes used in semiconductor, optical, and related technologies. This 2nd Edition has new information on components, lubrication, pump fluids, and other materials. Basic characteristics and operational procedures are given for each high-vacuum pumping system.

Customer Reviews

5 ratings

Pretty much everything

This book is indispensable for someone dealing with HV and UHV systems, especially in smaller science labs which do not have access to "institutional" knowledge or are venturing into new territory in the field of vacuum. Covers an extremely broad range of topics with helpful graphs and tables, and what it doesn't have is at least well referenced so you can go look it up. This book was never far from me when building a new instrument.

The Last Word in Flow Leak Detection!

A colleague who likes to call himself "Captain Suction" and I were debating the exigencies of a client's flow leak detection problem, and needless to say, things got quite hot. At least they did until I slammed O'Hanlon's volume on his cubicle and yelled, "Look it up, sucker!" I didn't hear a peep from him for weeks.

everyone in semiconductor industrie must read this book

Since I work in a very big semi' fab as field service engineer I looking for a good description of any tool part's on several manufacturing machines. But i work in Germany and it isn't so easy to find much more and better information as for an student without experience. It is my second book about vakuum technologie, all new kinds of engineering and also standard technologie is well prepaired in this issue. Some description of Pump's could be better or more funktionplan's , but all in one book is maybe too much. I was very surprised of this universal Handbook for engineer's and technician, best offer for all who need information about PVD, CVD, Implant vakuum etc. A lot of basic's in introduction part, well to understand, intresting gas properties, cluster technologie and last but not least - a big appendix with all what you need , very fine. Thank's for this good book.

congratulations

Thankful we found more complete data on vacuum system.

If you work with vacuum systems, DON'T LOAN THIS ONE!

John f. O'Hanlon is so thorough, and has so much to offer. Whether the reader is an engineer or an operator of a vacuum system there is plenty here for each. This is a reference book, so never lend it to anyone!
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