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Stephen Rossnagel
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Pvd for Microelectronics: Sputter Deposition Applied to Semiconductor Manufacturing. Thin Films, Volume 26.
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Author and Subject Cumulative Index, Including Tables of Contents Volumes 1-24, Volume 25: Subject and Author Cumulative Index, Volumes 1-24 (Thin Films)
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Handbook of Ion Beam Processing Technology: Principles, Depostion, Film Modification and Synthesis (Materials Science & Process Technology S.) (Materials Science & Process Technology)
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Handbook of Plasma Processing Technology: Fundamentals, Etching, Deposition and Surface Interactions (Materials Science and Process Technology Series): ... Science and Process Technology Series)
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