Ultraclean Surface Processing of Silicon Wafers: Secrets of VLSI Manufacturing

By Takeshi Hattori, S. Heusler, J.P. Webb

Book Overview

This book summarizes the knowledge and experience of the successful Japanese semiconductor companies. For the first time the secrets of processing of semiconductor surfaces for device production are disclosed. All the people and companies involved in manufacturing of silicon-based semiconductor devices should have this book.

• Format: Paperback
• Language: English
• ISBN: 3642082726
• ISBN13: 9783642082726
• Release Date: December 2010
• Publisher: Springer
• Length: 616 Pages
• Weight: 2.06 lbs.
• Dimensions: 1.4" x 6.0" x 9.0"