Defects and Diffusion in Silicon Processing: Volume 469

A strong effort is has been devoted to the investigation of defects and diffusion phenomena in silicon. This effort is not only driven by the stringent technological requirements for the processing of... This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 1558993738
• ISBN13: 9781558993730
• Release Date: November 1997
• Publisher: Materials Research Society
• Length: 541 Pages
• Weight: 2.05 lbs.
• Dimensions: 1.3" x 6.2" x 9.2"