Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices

Recently, aluminium scandium nitride (AlScN) emerged as a material with superior properties compared to aluminium nitride (AlN). Substituting Al with Sc in AlN leads to a dramatic increase in the piezoelectric coefficient as well as in electromechanical coupling. This discovery finally allowed us to overcome the limitations of AlN thin films in various piezoelectric applications while still enabling us to benefit from all of the advantages of the...

• Format: Hardcover
• Language: English
• ISBN: 3036563679
• ISBN13: 9783036563671
• Release Date: June 2023
• Publisher: Mdpi AG
• Length: 186 Pages
• Weight: 1.33 lbs.
• Dimensions: 0.6" x 6.7" x 9.6"