3-Dimensional Process Simulation

Whereas two-dimensional semiconductor process simulation has achieved a certain degree of maturity, three-dimensional process simulation is a newly emerging field in which most efforts are dedicated to necessary basic developments. Research in this area is promoted by the growing demand to obtain reliable information on device geometries and dopant distributions needed for three-dimensional device simulation, and challenged by the great algorithmic...

• Format: Paperback
• Language: English
• ISBN: 3709174309
• ISBN13: 9783709174302
• Release Date: October 2011
• Publisher: Springer
• Length: 196 Pages
• Weight: 0.76 lbs.
• Dimensions: 0.5" x 6.7" x 9.6"